DFA40_2-Axis Atmospheric Cylindrical Coordinate Single-Arm Wafer Cassette Handling Robot
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- Commodity name: DFA40_2-Axis Atmospheric Cylindrical Coordinate Single-Arm Wafer Cassette Handling Robot
- 产品: Semiconductor robot
- 应用: Atmospheric Film Canister Series
- 负载: 10-20 kg
- 臂长: 200-499 mm
DFA40_2-axis atmospheric cylindrical-coordinate single-arm wafer cassette handling robot—self-developed, safe and controllable, and fully capable of replacing imported brands.
Two-axis atmospheric cylindrical coordinate single-arm wafer cassette handling robotDFA40_DFA Series Semiconductor Robots- ● Employs closed-loop servo control
- ● Optional battery-free absolute encoder
- ● Arm length can be customized according to the equipment layout.
Arm length
400 mm
Rated/Maximum Load
12 kilogram
Carried object
4 to 12 Inch wafer cassette
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DFA40_2-Axis Atmospheric Cylindrical Coordinate Single-Arm Wafer Cassette Handling Robot
DFA40_2-axis atmospheric cylindrical-coordinate single-arm wafer cassette handling robot—self-developed, safe and controllable, and fully capable of replacing imported brands.
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