SA25_4-axis atmospheric 5-wafer handling robot
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- Specification Parameters
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- Commodity name: SA25_4-axis atmospheric 5-wafer handling robot
- 产品: Semiconductor robot
- 应用: Atmospheric Wafer Series
- 负载: 1-2 kg
- 臂长: 100-199 mm
SA25_4-axis atmospheric 5-wafer handling robot, independently developed with safety and controllability, fully capable of replacing imported brands.
4-axis atmospheric 5-wafer handling robotSA25_SA Series Semiconductor Robots- ● Uses closed-loop servo control
- ● Optional battery-free absolute encoder
- ● The base and extension axis stroke can be customized according to the equipment layout.
- ● End-effector type: Bottom-support type
Arm length
250 mm
Rated/Maximum Load
5 Wafer
Carried object
Φ100~Φ300 mm Wafer
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SA25_4-axis atmospheric 5-wafer handling robot
SA25_4-axis atmospheric 5-wafer handling robot, independently developed with safety and controllability, fully capable of replacing imported brands.
Product Category
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