TA4030F-01-03_3-Axis Atmospheric Cylindrical Coordinate Single-Arm Wafer Handling Robot
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- Commodity name: TA4030F-01-03_3-Axis Atmospheric Cylindrical Coordinate Single-Arm Wafer Handling Robot
- 产品: Semiconductor robot
- 应用: Atmospheric Wafer Series
- 负载: 2-5 kg
- 臂长: 200-499 mm
TA4030F-01-03: A 3-axis atmospheric cylindrical-coordinate single-arm wafer-handling robot, independently developed with safety and controllability, fully capable of replacing imported brands.
3-axis atmospheric cylindrical coordinate single-arm wafer handling robotTA4030F-01-03_TA Series Semiconductor Robot- ● Uses closed-loop servo control
- ● Optional battery-free absolute encoder
- ● The base and extension axis stroke can be customized according to the equipment layout.
- ● End-effector type: Bottom-support type
Arm length
200/260/320/400 mm
Rated/Maximum Load
3 kilogram
Carried object
≤Φ300mm Wafer
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Keywords:
TA4030F-01-03_3-Axis Atmospheric Cylindrical Coordinate Single-Arm Wafer Handling Robot
TA4030F-01-03: A 3-axis atmospheric cylindrical-coordinate single-arm wafer-handling robot, independently developed with safety and controllability, fully capable of replacing imported brands.
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