VA5204_3-axis vacuum cylindrical coordinate single-arm wafer handling robot
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- Commodity name: VA5204_3-axis vacuum cylindrical coordinate single-arm wafer handling robot
- 产品: Semiconductor robot
- 应用: Vacuum Wafer Series
- 负载: 1-2 kg
- 臂长: 500-1000mm
TBA4030F-07-09: A 4-axis atmospheric cylindrical-coordinate dual-arm wafer-handling robot, independently developed with safety and controllability, capable of fully replacing imported brands.
3-axis vacuum cylindrical coordinate single-arm wafer handling robotVA5204_VA Series Semiconductor Robot- ● Arm length and Z-axis stroke can be customized according to the equipment layout.
- ● Uses closed-loop servo control
- ● End-effector type: Bottom-support type
- ● Optional battery-free absolute encoder
Arm length
520 mm
Rated/Maximum Load
2 kilogram
Carried object
≤Φ300mm Wafer
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VA5204_3-axis vacuum cylindrical coordinate single-arm wafer handling robot
TBA4030F-07-09: A 4-axis atmospheric cylindrical-coordinate dual-arm wafer-handling robot, independently developed with safety and controllability, capable of fully replacing imported brands.
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