AHYQ3510F_4-Axis Vacuum Direct-Drive Dual-Arm Q-Type Wafer Handling Robot
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- Commodity name: AHYQ3510F_4-Axis Vacuum Direct-Drive Dual-Arm Q-Type Wafer Handling Robot
- 产品: Semiconductor robot
- 应用: Vacuum Wafer Series
- 负载: 1-2 kg
- 臂长: 200-499 mm
AHYQ3510F_4-axis vacuum direct-drive dual-arm Type B wafer-handling robot, independently developed with safety and controllability, fully capable of replacing imported brands.
4-axis vacuum direct-drive dual-arm Q-type wafer handling robotAHYQ3510F_AHY Series Semiconductor Robot- ● Highly reliable vacuum isolation, confidently handling high-vacuum environments.
- ● The motor directly drives the robot’s movement, enhancing operational reliability.
- ● High-strength, high-rigidity steel belt drive ensures high transmission accuracy for the arm.
- ● Employs closed-loop servo control to achieve high-precision position control.
- ● Simultaneously perform wafer swapping between two stations.
Arm length
355.5 mm
Rated/Maximum Load
≤1 kilogram
Carried object
≤Φ300mm Wafer
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Keywords:
AHYQ3510F_4-Axis Vacuum Direct-Drive Dual-Arm Q-Type Wafer Handling Robot
AHYQ3510F_4-axis vacuum direct-drive dual-arm Type B wafer-handling robot, independently developed with safety and controllability, fully capable of replacing imported brands.
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