TBA4894D_5-Axis Atmospheric Cylindrical Coordinate Dual-Arm Wafer Handling Robot
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- Specification Parameters
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- Commodity name: TBA4894D_5-Axis Atmospheric Cylindrical Coordinate Dual-Arm Wafer Handling Robot
- 产品: Semiconductor robot
- 应用: Atmospheric Wafer Series
- 负载: 2-5 kg
- 臂长: 200-499 mm
TBA4894D—5-axis atmospheric cylindrical-coordinate dual-arm wafer-handling robot, independently developed with safety and controllability, fully capable of replacing imported brands.
5-axis atmospheric cylindrical coordinate dual-arm wafer handling robotTBA4894D_TBA Series Semiconductor Robot- ● Uses closed-loop servo control
- ● Arm length and Z-axis stroke can be customized according to the equipment layout.
- ● Optional battery-free absolute encoder
- ● Optional sensor types for mapping: through-beam, retroreflective
- ● Optional end-effector types: vacuum suction type, gripping type, and flip-suction type
Arm length
200/260/320/400 mm
Rated/Maximum Load
3 kilogram
Carried object
≤Φ300mm Wafer
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TBA4894D_5-Axis Atmospheric Cylindrical Coordinate Dual-Arm Wafer Handling Robot
TBA4894D—5-axis atmospheric cylindrical-coordinate dual-arm wafer-handling robot, independently developed with safety and controllability, fully capable of replacing imported brands.
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