CA26_Single-Axis Atmospheric Wafer Handling Robot
- Product Description
- Specification Parameters
- Download Materials
-
- Commodity name: CA26_Single-Axis Atmospheric Wafer Handling Robot
- 产品: Semiconductor robot
- 应用: Atmospheric Film Canister Series
- 负载: 1-2 kg
- 臂长: 200-499 mm
The CA single-axis atmospheric wafer handling robot, independently developed with safety and controllability, can fully replace imported brands.
Single-axis atmospheric wafer handling robotCA26_CA Series Semiconductor Robots- ● Employs closed-loop servo control
- ● Optional battery-free absolute encoder
- ● Arm length can be customized according to the equipment layout.
Arm length
260 mm
Rated/Maximum Load
3 kilogram
Carried object
4~8 Inch wafer cassette
-
Keywords:
CA26_Single-Axis Atmospheric Wafer Handling Robot
The CA single-axis atmospheric wafer handling robot, independently developed with safety and controllability, can fully replace imported brands.
Product Category
Content update in progress,...